Abstract
Energy-trapped thickness vibrations of piezoelectric substrates are utilized in fabricating resonators and filters which have their operating frequencies in HF band. Normalized particle displacement distributions of the fundamental thickness shear vibration mode and overtone modes into the thickness direction in energy-trapped resonators and double-coupled filters were obtained by solving the wave equation and calculating the solved equations. These results show that as the number order of the harmonic mode in a energy-trapped resonator becomes larger, the degree of energy-trapping in the resonator increase, and if the conditions for energy-trapping become sufficiently weak, the energy-trapping effect of the harmonic mode which has the lower order disappears the earlier. Above simulation results were proved by the experiments.
