한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제31권3호
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- Pages.142-150
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- 1998
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
DC Magetron Suttering법으로 제작한 Ti$_{x}$ N 박막의 밀착력에 미치는 첨가원소(C,H,O)
The Effects of Additional Gases(C,H,O) on Adhesive strength Ti$_{x}$ N Films Prepared by the DC Magetron Suttering Method
초록
Stainless steel is being used widely for various purposes due to its good corrosion resistance. There has been much research to produce colored stainless steel by several methods such as anodizing and ion plating. In this experiment, we coated TiN(C,O,H)films SUS304 substraate with the DC magnetron spttering system made by Leybold Heraeus and studied the interlater structure and abhesive strength of the films as a function of additional gases, acetylene, hydrogen and oxygen. When the acetylene gas was added into the chamber, the specimen with the interlayer phase had good adhesion due to the toughness of the
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