전기화학적 에칭법에 의한 텅스텐 와이어의 Sharp tip 제조에 관한 연구

Tungsten With Tip Sharpening by Electrochemical Etching

  • 발행 : 1998.02.01

초록

Sharp tips are commonly used for applications in fields as diverse as nanolithography, lowvoltage field emitters, emitters, nanoelectroniecs, electrochemisty, cell biology, field-ion and electron microscopy. tungsten wire, mater만 used in this experiment, which test the chip of wafer has been used to the needle of probe card. Tungsten wire was sharpened by electrochemical etching methode to get a typical tip shape.

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