Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
권호 표지

INVESTIGATION OF ENERGETIC DEPOSITION OF Au/Au (001) THIN FILMS BY COMPUTER SIMULATION

  • Zhang, Q. Y. (State Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology) ;
  • Pan, Z. Y. (Accelerator-bsed Atomic and Nuclear Physics Laboratory, Institute of Modern Physics, Fudan University) ;
  • Zhao, G. O. (Accelerator-bsed Atomic and Nuclear Physics Laboratory, Institute of Modern Physics, Fudan University)
  • Published : 1998.07.01
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Abstract

A new computer simulation method for film growth, the kinetic Monte Carlo simulation in combination with the results obtained from molecular dynamics simulation for the transient process induced by deposited atoms, was developed. The behavior of energetic atom in Au/Au(100) thin film deposition was investigated by the method. The atomistic mechanism of energetic atom deposition that led to the smoothness enhancement and the relationship between the role of transient process and film growth mechanism were discussed. We found that energetic atoms cannot affect the film growth mode in layer-by-layer at high temperature. However, at temperature of film growth in 3-dimensional mode and in quasi-two-dimensional mode, energetic atoms can enhance the smoothness of film surface. The enhancement of smoothness is caused by the transient mobility of energetic atoms and the suppression for the formation of 3-dimensional islands.

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