Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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Pt-and $TiO_2-doped\; Nb_2O_5$ Thin Film by Ion-Beam-Enhanced Deposition

  • Zhu, Jianzhong (State Key Laboratories of Transducer Technology) ;
  • Ren, Congxin (Ion Beam Laboratory Shanghai Institute of Metallurgy, Chinese Academy of Sciences)
  • Published : 1998.07.01
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Abstract

This paper describes the preparation of Pt-and $TiO_2$-doped $Nb_2O_5$ thin film by Ion-Beam-Enhanced Deposition. Platinum and titanium doping, and Nb2O5 deposition were carried out in situ. The dependence of oxygen sensing properties on the amounts of Pt and Ti dopant in the $Nb_2O_5$ film was investigated. There were the highist sensitivity, the lowest temperature coefficient and the shortest responce time at doping of 5 mol% $TiO_2$ and 0.3 mol%Pt

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