Magneto-Optical Properties of Co-based MnSbPt Thin Films Prepared by RF Magnetron Sputtering

RF Magnetron Sputtering 으로 제작된 Co-based MnSbPt 합금박막의 자기광학적 성질

  • Yun, Hyeon-Muk (Dept. of Materials Engineering, Chungnam National University) ;
  • Hong, Yeon-Gi (Dept. of Materials Engineering, Chungnam National University) ;
  • Lee, Gyeong-Jae (Dept. of Materials Engineering, Chungnam National University) ;
  • Kim, Jong-O (Dept. of Materials Engineering, Chungnam National University)
  • Published : 1998.02.01

Abstract

Magnetic and Magneto-Optical properties of Co-based MnSbPt thin films prepared by R.F Sputtering were investigated. In this study, the optimum heat treatment condition was found to be $300^{\circ}C$-4hours under a $5\times10^{-6}$ Torr, but perpendicularly magnetized thin films could not be obtained. Coercive force showed maximum value of about 5000e at $250\AA$ Co thickness but the value is not enough for practical use of the thin film. Heat treated Co-based MnSbPt thin film shows 0.78 degree of Kerr rotation angle for 700nm of incident wavelength.

R.F. Magnetron Sputtering 법으로 Co를 base로 MnSbPt 합금박막의 최적 열처리 조건은 $300^{\circ}C$-4시간 이었으나, 종래의 MnSbPt 합금박막의 경우와 같이 수직자화막은 얻을 수 없었다. 보자력은 Co의 두께가 $250\AA$에서 최대를 나타냈으나 약 500 Oe이하로 실용적 측면에서 불충분 하였다. 진공중에서 $300^{\circ}C$ 4시간 열처리한 합금박막의 경우, 700nm의 입사파장에서 약 $0.78^{\circ}$에 이르는 Kerr 회전각을 보이므로 고보자력을 지닌 수직자화막을 제조할 수 있다면 우수한 차세대 고밀도 자기 기록매체로서 유망하다.

Keywords

References

  1. Magnetic Recording Handbook C. Denis Mee;Eric D. Daniel
  2. 전기전자재료학회지 v.1;3 김순광
  3. 한국자기학회 v.2 신성철
  4. 한국자기학회지 v.4 오상호;주상기
  5. J. Appl. Phys. v.62 H.J.G.Draaisima;W.J.M de Jonge
  6. Appl. Phys. Lett. v.47 P.F Carciia;A.D.Meinhaldt;A.Suna
  7. J. Apple Phys. v.67 no.1 S.C.Shin;A.C.Palumbo
  8. J. Apple. Phys. v.67 no.9 S.Hashimoto;Y.Ochiai;K.Aso
  9. Applied Physics Letters ncd v.42 P.G.Van Engen;K.H.J.Buschow;R.Jongbreur;Ermen
  10. Japanese Journal of Applied Physics v.27 Koki Takanashi;Hiroyasu Fusimori;Jun Watanabe;Masuhiro Shoji;Aisaku Nagai
  11. IEEE Trans. Magn. v.MAG-24 S.Ohnuma;A.Kunimoto;T.Masumoto
  12. 日本應用磁氣學會誌 v.14 國元晃;中野內新雄;大沼 繁弘
  13. J. Magn. Soc. Jpn. v.11 no.SUP.S1 K.Matsubara;M.Koyama;T.Kotanagi;Y.Watanabe;T.Yoshitomi
  14. 日本應用磁氣學會誌 v.14 渡邊雅人;高梨弘毅;藤森啓安
  15. Jpn. J. Appl. Phys. v.26 S.Hatta;T.Shiono;H.Adachi;K.Wasa
  16. J. Magn. Magn. Mater v.131 Migaku Takahashi;H.Shoji;Y.Hozumi;T.Wakiyama
  17. J. Magn. Soc. Jpn. v.14 M.Takahashi;Y.Kikuchi;T.Tanaka;T.Wakiyama
  18. 한국재료학회 춘계 학술발표회 v.A-15 R.F Magnetron sputtering으로 제작된 MnSbPt 합금박막의 광자기적 성질 송영민;이경재;김종오
  19. 日本應用 磁氣學會誌 v.15 Y.Hosoki;N.Mikami;H.Noda;T.Koyanagi;K.Matsubara
  20. J. Phys. Chem. Solids v.56 no.11 D.Weller;A.Carl;R.Savoy;T.C.Huang;M.F.Toney;C.Chappert
  21. 光と磁氣 Katsuaki Satou