Journal of Electrical Engineering and information Science
- Volume 3 Issue 2
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- Pages.245-250
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- 1998
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- 1226-1262(pISSN)
Novel Fabrication Process of Vertical Spring for Micro Mirror
- Lim, Tae-Sun (Seoul National University) ;
- Shin, jong-Woo (Seoul National University) ;
- Kim, Yong-Kweon (Seoul National University) ;
- Park, Bumkyoo (Seoul National University)
- Published : 1998.04.01
Abstract
Novel fabrication process of vertical spring for micro mirror array is proposed. The proposed fabrication process adopts a shadow evaporation process using shielding screen structure on top of the sacrificial layer. The 50
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