E2M - 전기 전자와 첨단 소재 (Electrical & Electronic Materials)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

Magnetic Properties and Microstructures of Co-Cr-(Pt)-Ta Magnetic Thin Films Sputtered on Self-textured Substrates

  • Shin, Kyung-Ho (Thin Film Technology Center, Korea Institute of Scienceand Technology) ;
  • Chang, Han-Sung (Department of Mater. Sci., & Eng., Korea Advanced Institute of Science and Technology) ;
  • Lee, Taek-Dong (Department of Mater. Sci., & Eng., Korea Advanced Institute of Science and Technology) ;
  • Park, Joong-Keun (Department of Mater. Sci., & Eng., Korea Advanced Institute of Science and Technology)
  • 발행 : 1998.10.01
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초록

The effects of Al micro-bumps on the magnetic properties of CoCr(Pt)Ta/Cr films deposited on glass substrates were investigated. The coercivity increased and the coercivity squareness decreased by incorporating Cr/Al underlayers. The cause of the coercivity increase is attributed to the reduction of Co(0002) texture, the increase of magnetic isolation of CoCr(Pt)/Ta grains, and the refinement of CoCr(Pt)/Ta grains deposited on Cr/Al underlayers. The effects of an Al overlayer on the magnetic properties of CoCr(Pt)Ta/Cr films were also studied. The decrease of coercivity squareness is ascribed to the magnetic isolation of CoCr(Pt)Ta grains.

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