Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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The Capacitance Properities of DLPC Liquid Membrance Fabricatied by LB Method

LB법에 의해서 제작된 DLPC 지질막의 캐패시턴스 특성

  • 정용호 (서강정보대학 열냉동과) ;
  • 이우선 (조선대학교 공대 전기공학과)
  • Published : 1998.08.01
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Abstract

LB layers L-$\alpha$-DLPC deposited by LB method were deposited onto n-type silicon wafer as Z-type film. Films made up of 8, 16 layers of lipid with long alkyl chain and the thickness of monolayer and multiayers was determined by ellipsometry. Ut was deposited Ag and Al onto LB layers and silicon wafer for electrode and small electrode exhibit high capacitiance and low lekage current. The C-V curves of the MLS capacitor shows very high saturation value of capacitance. And cross-sectional SEM image of MLD capacitor indicated the presence of pore with Al electrode and we found that the Ag is good for electrode metal.

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References

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