Effects of Conditions of Silicon Substrates on The Formation and Electrical Properties of TiSi$_2$ Thin Films

기판 조건에 따른 TiSi$_2$박막의 형성 및 전기적 특성 변화 고찰

  • 김은하 (연세대학교 세라믹공학과) ;
  • 고대홍 (연세대학교 세라믹공학과)
  • Published : 1998.11.01

Abstract

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References

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