한국세라믹학회지 (Journal of the Korean Ceramic Society)

  • 제35권9호
  • /
  • Pages.969-973
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  • 1998
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  • 1229-7801(pISSN)
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  • 2234-0491(eISSN)
한국세라믹학회 (The Korean Ceramic Society)
권호 표지

저온도포열분해에 의해 제조된 Pb(Zr, Ti)O$_3$ 박막의 에피탁시와 결정화도에 미치는 전열처리 시간의 영향

Effect of Prefiring Time on Epitaxy and crystallinity of Pb(Zr, Ti)O$_3$ Thin Films in Low Temperature Pyrolysis

  • 황규석 (전남대학교 공과대학 세라믹공학과) ;
  • 이형민 (전남대학교 공과대학 세라믹공학과) ;
  • 김병훈 (전남대학교 공과대학 세라믹공학과)
  • 발행 : 1998.09.01
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초록

Pb(Zr, Ti)O3 (PZT) (Zr:Ti= 52: 48) thin films were prepared on MgO(100) substrates by dipping-py-rolysis process using metal naphthenates as starting materials. Thin films were fabricated by spin coating technique and the precursor films were prefired at 20$0^{\circ}C$ in air for 0.5, 1, 2, 3, and 24 h followed by final heat treatment at 75$0^{\circ}C$ for 30min. Film prefired for 24 h lost orientational properties and pole figure analysis showed the lost of the epitaxial relationship between the films and substrate while highly a/c-axis oriented thin films were obtained for the samples prefired for 1, 2, and 3h.

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참고문헌

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