Atmosphere Effects in Low Temperature Pyrolysis of Chemical Solution Derived Pb(Zr, Ti) O3 Films

  • Hwang, Kyu-Seog (Department of Ceramic Engineering, Chonnam National University) ;
  • Lee, Hyung-Min (Department of Ceramic Engineering Chonnam National University) ;
  • Kim, Byung-Hoon (Department of Ceramic Engineering Chonnam National University)
  • Published : 1998.09.01

Abstract

$Pb(Zr, Ti)O_3$ (Pb:Zr:Ti=1:0.52:0.48) thin films were prepared on single crystal MgO(100) substrates by dipping-pyrolysis process using a solution of constituent metal naphthenates as starting materials. The solution was spin-coated onto substrate and the precursor films were pyrolyzed at $200^{\circ}C$ in air or at $200^{\circ}C$ in argon for 1, 2, 5 and 24h, followed by final heat treatment at $750^{\circ}C$. For all the films, highly (h00)/(00l)-oriented Pb$Pb(Zr, Ti)O_3$ thin films with smooth surfaces and crack-free were obtained, whereas thin film pyrolyzed in air for 24 h exhibited polycrystalline character. According to the pole-figure analysis, epitaxy of the product films was found to depend on pyrolysis atmosphere.

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References

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