The Korean Journal of Ceramics

The Korean Ceramic Society (한국세라믹학회)
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Deposition of Diamond Film by Hydrogen-oxyacetylen Combustion Flame

  • Published : 1998.03.01
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Abstract

Diamond film was deposited on Mo substrate at atmospheric pressure using combustion flame apparatus with the addition of H2. At a temperature above 100$0^{\circ}C$, parts of the film were converted into graphites and these were etched by hydrogen atoms. With increasing $C_2H_2/O_2$ ratio, the nucleation density of the film increased. But the greater part of the film was formed with cauliflower-shaped amorphous carbon. These amorphous carbn were crystallized etching amorphous carbon.

Keywords

References

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