Journal of the Korean Institute of Telematics and Electronics D (전자공학회논문지D)
- Volume 35D Issue 5
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- Pages.63-68
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- 1998
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- 1226-5845(pISSN)
Temperature compensation method of piezoresistive pressure sensor using compensating bridge
보상용 브릿지를 이용한 압저항형 압력센서의 온도보상 방법
Abstract
The absolute pressure sensor using SDB wafer has been fabricated. the structure of the sensor consists of two wheatstone bridges and a diaphragm. One of the two wheatstone bridges is located on the edge of diaphragm, and the other is located on the center of diaphragm. The diaphragm cavity is sealted in vacuum (~10
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