The Permeation Characteristics of $O_{2}/N_{2}$ Gas for Composite Membrane Prepared by Plasma Polymerization

플라즈마 종합에 의해 제조된 복합막에 대한 $O_{2}/N_{2}$의 기체투과 특성

In this study, we prepared non-porous plasma membrane for having high permeability and selectivity and this membrane was deposited on the $Al_{2}O_{3}$ membrane by using $CHF_{3}$ & $SiH_{4}$ monomer. Also, we investigated for the permeation characteristics of the plasma polymer membrane by Ar plasma treatment. When the position of substrate was near cathode, the selectivity was increased with Ar plasma treatment time and rf-power. The pore size of $Al_{2}O_{3}$ membrane had an effect on the permeability and the position of substrate affected selectivity.