2단 튜브형 가열로 반응기에 의한 초미세 SiO₂ 입자의 제조 및 증착 연구

A Study on Ultrafine SiO₂ Particles Generation and Deposition by 2-Stage Tube Furnace Reactor

The effects of preheating the gas stream on deposition characteristics of ultrafine $SiO_2$ particles were investigated theoretically. The model equations such as mass and energy balance equations and aerosol dynamic equations were solved to predict the particle growth and deposition. The gas temperatures, $SiCl_4$ concentrations, $SiO_2$ particle volumes, $SiO_2$ particle sizes and deposition efficiencies of $SiO_2$ particles were calculated for various preheating temperatures. As the preheater setting temperature increases, the $SiO_2$ particle size distribution becomes more uniform, because the effect of $SiCl_4$ diffusion decreases.