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Analytical Characteristics and Applications of Laser Ionization Mass Spectrometry

  • 발행 : 1997.01.20

초록

We have built a laser ionization mass spectrometer (LIMS) for chemical composition analysis of solid samples, which employs an Nd:YAG laser and a time-of-flight mass analyzer. In this spectrometer, the maximum mass we identified clearly is higher than 2000 amu. A mass resolution of 230 has been achieved at m/z 208 (Pb element) in the linear TOFMS and can be even improved up to 1550 by employing a reflectron. The detection limit is determined to be on the order of ppm for Fe and In. The depth resolution is found to be about 20Å/spectrum with a laser power of 0.5 J/cm2. We also report a preliminary application of the LIMS to identifying impurities resident in several solid samples.

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참고문헌

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