Fabrication of Ultrasonic Motors of Wind-Mill Type using Piezoelectric Ceramics and Its Characteristics

압전 세라믹스를 이용한 풍차형 초음파 전동기의 제작과 특성

A miniaturized wind-mill type ultrasonic motor which has diameter in 12.7 mm and thickness in 2.0mm using PMN-PZT piezoelectric ceramics was fabricated. The wind-mill type ultrasonic motors has only three plate and of two wind-mill shape slotted metal endcaps a rotor whose end is hollowed out so that its periphery fits with the shape of the stator and a bearing to guide the rotor. A Finite Element Analysis was carried out to obtain the endcaps behavior under a radial displacement change of piezoelectric disk and to optimize the structure of the number of slots. Increasing the applied voltage the revolution speed of ultrasonic motors was increased. The maximum speed of 700 rpm and the maximum torque of 0.22 nN·m of the wind-mill type ultrasonic motors were obtained.