Fabrication of Bi-based High-Tc superconducting thin films by 4-target RF magnetron sputtering methods

4원타깃 RF마그네트론 스퍼터링법을 이용한 Bi계 고온 초전도체 박막의 제작

  • Published : 1997.11.01

Abstract

Bi based superconducting thin films were fabricated by 4-target RF magnetron sputtering using the method of controlling the on-off time. These thin films showed better crystal structures. The ratio of Cu/Bi decreased but the critical temperature increased with increasing the temperature of the substrate. High temperature phase low temperature of the substrate. High temperature phase low temperature phase and semiconducting phase can be formed by controlling the on-off time of the shutter respectively.

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