Journal of the Korean institute of surface engineering (한국표면공학회지)
- Volume 30 Issue 4
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- Pages.255-261
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- 1997
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
Effect of Doping on the Ionic Conductivity of Li$_2$ Po$_{4-x}$ N$_{x}$ thin Film
Li$_2$ Po$_{4-x}$ N$_{x}$ 박막의 이온전도도에 미치는 Ti 첨가
Abstract
Thin film batteries can be used as a micro power source for electronic in which minute power is needed. In this study, lithium phosphorous oxynitride(LIPON) thin films were deposited as an eletrolyte for lithium ion batteries using RF magentron sputtering of lithium phosphate in N2. Ti was also added into the LIPON films as a second network former to enhance the ioinc conductivity of the films. The optimum conditions for LIPON film deposition were sought and the electrolyte with the conductivity of
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