Journal of the Korean Vacuum Society (한국진공학회지)
- Volume 6 Issue S1
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- Pages.166-171
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- 1997
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- 1225-8822(pISSN)
Some Applications of Ion Beam Enhanved Deposition Techniques
- Zhang, Fu-min (Ion Beam Laboratory Shanghai Institute of Metallurgy Chinese Academy of Sciences)
- Published : 1997.10.01
Abstract
IBED is a very promosing thin film deposition method because of its many advantages, such as excellent adhesion property of films to substrates, room temperature processing, ease of control over the composition and thickness of films, and so on, over the conventional techniques, It has been widely applied in the field of surface modification of materials in the last decade. In our laboratory, many kinds of thin films, such as wear-resistant hard coatings, corrosion and oxidation protective coatings, biomaterial films, buffer layer for high temperature superconductor films, and oxygen sensitive film, have been synthesized by IBED, and several industrial applications of the IBED films have been conducted.
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