Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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A study on the solder ball shape variation of the Pb-In alloys on the reflowing with heating rate

리플로시 가열 속도에 따른 Pb-In 합금의 솔도볼 형상 변화에 관한 연구

  • Mun, Jong-Tae (Electronics and Telecommunications Research Institute) ;
  • Lee, Sang-Hwan (Electronics and Telecommunications Research Institute) ;
  • Ju, Gwan-Jong (Electronics and Telecommunications Research Institute) ;
  • Lee, Hui-Tae (Electronics and Telecommunications Research Institute) ;
  • Song, Min-Gyu (Electronics and Telecommunications Research Institute) ;
  • Pyeon, Gwang-Ui (Electronics and Telecommunications Research Institute)
  • 문종태 (한국전자통신연구원 반도체 연구단) ;
  • 이상환 (한국전자통신연구원 반도체 연구단) ;
  • 주관종 (한국전자통신연구원 반도체 연구단) ;
  • 이희태 (한국전자통신연구원 반도체 연구단) ;
  • 송민규 (한국전자통신연구원 반도체 연구단) ;
  • 편광의 (한국전자통신연구원 반도체 연구단)
  • Published : 1997.04.01
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Abstract

Pb-In솔더를 Si기판에 증착후 리플로시 가열 속도와 플럭스 사용에 따른 솔도볼 형성 거동, 증착 솔더이동, UBM(under Mump Metallurgy)의 Au층과 In간의 금속간 화합물 형성에 관하여 연구하였다. 가열 속도가 1$^{\circ}C$/min에서 1$0^{\circ}C$/min, 2$0^{\circ}C$/min로 증가하고, 플럭스를 적용한 경우 솔더볼은 용이하게 형성되었다. 특히 플럭스를 사용하여 형성시킨 솔더볼에서는 UBM Au층과 In간의 반응에 의하여 Auln 금속간 화합물이 형성되었다.

Keywords

References

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