References
- Proc. Int. Symp. SAW Devices for Mobile Comm. Nanometer fabrication processing technology and GHZ-range unidirectional low-loss SAW filters Kazuhiko Yamanouchi
- Handbook of Sputter Deposition Technology K. Wasa;S. Hayakawa
- Proc. of the IEEE v.77 no.10 Applications of surface acoustic and shallow bulk acoustic wave devices Colin K. Campbell
- IEEE Trans on Ultra, Ferroelectrics, and Frequency Control v.UFFC-33 no.3 High-coupling and high-velocity SAW using ZnO and AIN films on a glass substrate Tadashi Shiosaki;Yasuki Mikamura;Fumio Takeda;Akira Kawabata
- IEEE Trans on Ultra, Ferroelectrics, and Frequency Control v.UFFC-42 Theoretical study on SAW characteristics of layered strutures including a diamond layer H. Nakahata;A. Hachigo;K. Higaki;S. Fujui;S. Shikata;N. Fujimori
- J. Vac. Sci. Tech. Characteristics of the hydrogenated aluminum nitride(AIN:H) films prepared by RF reactive sputtering and their application to surface acoustic wave (SAW) devices Yoon-Joong Yong;Jai-Young Lee
- IEEE Trans. on Sonics and Ultrasonics v.SU-32 no.5 Zero-temperature-coefficient SAW devices on AIN epitaxial films Kazuo Tsubouchi;Nobuo Mikoshiba
- Jpn. J. Appl. Phys. v.33 no.5B Characteristics of AIN thin films deposited by electron cyclotron resonance dual-ion-beam sputtering and their application to GHz-band surface acoustic wave devices H. Okano;N. Tanaka;Y. Hirao;Y. Kobayashi;K. Shibata;S. Nakano
- Jpn. J. Appl. Phys. v.31 no.10 Preparation of c-axis oriented AIN thin films by low-temperature reactive sputtering Horoshi Okano;Yusuke Takahashi;Toshiharu Tanaka;Kenichi Shibata;Stoichi Nakano
- Appl. Phys. Lett. v.36 no.8 Low-temperature growth of piezoelectric AIN films by rf reactive planar magnetron sputtering T. Shiosaki;T. Yamamoto;T. Oda;A. Kawabata
- IEEE Trans on Microwave Theory and Techniques v.MTT-21 no.4 Impulse model design of acoustic surface-wave filters Clinton S. Hartmann;DeLamar T. Bell, Jr.;Ronald C. Rosenfeld
- Digital Signal Processing William D. Stanley
- IEEE MTT-S Digest Design and performance of wide-band IIDT-type SAW filters with low loss and improved sidelobe suppression R. Weigel;B. Bader;G. Fischerauer;P. Russer
- IEEE Trans. on Ultrasonics, Ferroelectrics, and Frequency Control v.41 no.3 Equivalent networks for SAW interdigital transducers Kiyoshi Inagawa;Masanori Koshiba
- IEEE Trans. on Ultrasonics, Ferroelectrics, and Frequency Control v.36 no.1 A theoretical and experimental study of low-loss SAW filters with interdigitated interdigital transducers Peter M. Smith;C. K. Campbell