Abstract
TiO$_{2}$ tin films have been grown by MOCVD and their cahracteristics of crystallization and microstructures ahve been invetigated. Envelope mehtods are applied to the analysis of the transmission spectra to obtain the optical constants such as refractive indices and extinction coefficients for the TiO$_{2}$ thin films. The envelope methods are proved to be accurate by simulatin gthe transmission spectra. TiO$_{2}$ thin films start to crystallize at 350.deg.C and then crystallize fully into anatase phase at 400.deg.C or higher temperatures. Activation energies are obtained by plotting the deposition rate with varying the substrate temperature. It is 17.8 kcal/mol for the reaction limited regions. The refractive index and the extinction coefficient of the TiO$_{2}$ thin film at .gamma.=632.8 nm increases from 2.19 to 2.32 and decreases from 0.021 to 0.007, respectively, as the substrate temperature increases from 400 to 600.deg. C.
