센서학회지 (Journal of Sensor Science and Technology)
- 제6권2호
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- Pages.155-162
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- 1997
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
초음파(超音波) 분무(噴霧) 열분해법(熱分解法)으로 r-plane 사파이어 위에 증착(蒸着)된 ZnO 막(膜)의 특성(特性)
Properties of ZnO Films on r-plane Sapphires Prepared by Ultrasonic Spray Pyrolysis
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Ma, Tae-Young
(Dept. of Electrical Engineering, Gyeongsang National University) ;
- Moon, Hyun-Yul (Dept. of Electrical Engineering, Gyeongsang National University) ;
- Lee, Soo-Chul (Dept. of Electrical Engineering, Gyeongsang National University)
- 발행 : 1997.03.31
초록
zinc acetate를 포함하는 용액으로부터 r-plane 사파이어 기판 위에 ZnO 막(膜)을 증착하였다. 초음파(超音波) 발생기(發生器)로 용액을 진동시켜 증기입자를 만든 후 이것을 고온 반응로(反應盧) 내에서 열분해(熱分解) 시켜 막(膜)을 증착하였다. 제조된 막(膜)의 결정성, 표면형태 및 조성을 XRD, SEM 및 AES로 각각 분석하였다. 기판온도가 막(膜)의 특성에 미치는 영향에 대해 조사하였다. 기판온도
Zinc oxide(ZnO) thin films were deposited on r-plane sapphires from a solution containing zinc acetate. The films were obtained in a hot wall reactor by the pyrolysis of an aerosol produced by an ultrasonic generator. The crystallinity, surface morphology and composition of the films have been studied using the x-ray diffraction method(XRD) scanning electron microscopy(SEM) and Auger electron spectroscopy (AES) respectively. The influences of the substrate temperature on the crystallinity of the films were studied. Strongly (110) oriented ZnO films were obtained at a substrate temperature of
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