센서학회지 (Journal of Sensor Science and Technology)
- 제6권3호
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- Pages.237-244
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- 1997
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
Fabrication of low power micro-heater for micro-gas sensor II. Characteristics of micro-gas sensor
- Chung, Wan-Young (Dept. of Electronic Engineering, Semyung Univ.) ;
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Lee, Sang-Moon
(School of Electronic & Electrical Engineering, Kyungpook National University) ;
- Kang, Bong-Hwi (School of Electronic & Electrical Engineering, Kyungpook National University) ;
- Jang, Dong-Kun (Semiconductor R&D Center, KEC) ;
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Lee, Duk-Dong
(School of Electronic & Electrical Engineering, Kyungpook National University) ;
- Yamazoe, Noboru (Dept. of Materials Science and Technology, Kyushu University)
- 발행 : 1997.05.31
초록
A new planar-type microsensor, which had a platinum heater and a sensing layer on the same plane was fabricated on silicon substrate with stress-relieved PSG(phosphosilicate glass)/
키워드