A Study on the Deposition Characteristics of Ultrafine SiO₂ Particles by Temperature Control in Deposition Zone

증착 구간에서의 온도 제어에 따른 SiO₂ 초미립자의 증착 특성 고찰

The deposition characteristics of ultrafine $SiO_2$ particles were investigated in a tube furnace reactor theoretically and experimentally controlling tube wall temperature in deposition zone. The model equations such as mass and energy balance equations and aerosol dynamic equations inside reactor and deposition tube were solved to predict the particle growth and deposition. The particle size and deposition efficiencies of $SiO_2$ particles were calculated, changing the process conditions such as tube furnace setting temperature, total gas flow rate inlet $SiCl_4$ concentration and were compared with the experimental results.