Journal of the Korean institute of surface engineering (한국표면공학회지)
- Volume 29 Issue 6
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- Pages.829-833
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- 1996
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
COMPOSITION OF SUPERCONDUCTING YBCO THIN FILMS WITH RF REACTIVE SPUTTERING CONDITIONS
- Kim, H.H. (Department of Electronic Engineering, Doowon Institute of Technology) ;
- Kim, S. (Inorganic Chemistry Department, National Institute of Technology and Quality) ;
- Shin, S.H. (Inorganic Chemistry Department, National Institute of Technology and Quality) ;
- Park, J.I. (Inorganic Chemistry Department, National Institute of Technology and Quality) ;
- Park, K.J. (Inorganic Chemistry Department, National Institute of Technology and Quality)
- Published : 1996.12.01
Abstract
Superconducting YBaCuO thin films were deposited on MgO (100) single crystal substrate by rf reactive sputtering method. Sputtering target was prepared by mixing the original powders of
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