Journal of the Korean institute of surface engineering (한국표면공학회지)
- Volume 29 Issue 6
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- Pages.660-665
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- 1996
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
OPTICAL PROPERTIES OF INDIUM OXIDE AND INDIUM TIN OXIDE FILMS PREP ARED BY SPUTTERING
- Fujita, Yasuhiko (Department of Electronic Systems Engineering, Tokyo Metropolitan Institute of Technology) ;
- Kitakizaki, Kaoru (Research Development Headquarters, Meidensha Corporation)
- Published : 1996.12.01
Abstract
Thin films of indium oxide and indium tin oxide have been prepared by d.c. magnetron sputtering onto the fused silica substrates kept at 90, 200 and
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