한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제29권6호
- /
- Pages.648-653
- /
- 1996
- /
- 1225-8024(pISSN)
- /
- 2288-8403(eISSN)
OPTICAL EMISSION SPECTROSCOPY OF Ch$_4$ /Ar/H$_2$ GAS DISCHARGES IN RF PLASMA CVD OF HYDROGENATED AMORPHOUS CARBON FILMS
- Lee, Sung-Soo (Department of Materials Processing Engineering, School of Engineering, Nagoya University) ;
- Osamu Takai
- 발행 : 1996.12.01
초록
Hydrogenated amorphous carbon(a-C:H) films are prepared by rf plasma CVD in a
키워드