Journal of the Korean institute of surface engineering (한국표면공학회지)
- Volume 29 Issue 5
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- Pages.393-398
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- 1996
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
SOFT MAGNETIC PROPERTIES OF FeTaNC NANOCRYSTALLINE FILMS
- Koh, Tae-Hyuk (Dept. of Met. & Mater. Sci., Hong-ik Univ.) ;
- Shin, Dong-Hoon (Mater. Sci., Hong-ik Univ.) ;
- Choi, Woon (Mater. Sci., Hong-ik Univ.) ;
- Ahn, Dong-Hoon (Multimedia Lab. LG Electronics) ;
- Nam, Seoung-Eui (Multimedia Lab. LG Electronics) ;
- Kim, Hyoung-June (Multimedia Lab. LG Electronics)
- Published : 1996.10.01
Abstract
Soft magnetic properties and microstructural evolution of FeTaNC films were investigated, and compared with FeTaN and FeTaC films. Effects of substrate species (glass vs.
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