Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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Monte Carlo simulation for the transport of ion in matter

물질내의 이온수송에 대한 Monte Carlo 전산모사

  • Published : 1996.12.01
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Abstract

The scattering of incident ions and target atoms in the amorphous solid matters are calculated by Monte Carlo simulation method. The experimentally derived universal scattering cross-section of Kalbitzer and Oetzmann is used to describe nuclear scattering. For electronic energy loss, the Lindhard-Scharff and Bethe formula are used. Comparing the ion scattering formulas and ranges with the known results of experiment and other programs, we find our results are good agreement with others.

비정질 고체시료에 입사한 이온의 산란과 탄성충돌에 의한 시료원자의 산란을 몬테칼로 방법으로 전산모사 프로그램을 개발하였다. 핵산란은 Kalbitzer와 Oetzmann이 실험적인 검증을 통하여 보정한 만유산란 단면적식을 사용하고, 전자적인 에너지 손실은 Lindhard-Scharff와 Bethe의 공식들을 내삽법으로 적용하였다. 그외의 공식들은 최근에 이르기까지 대부분의 전산모사 프로그램에서 일반적으로 사용하는 방법을 적용하였다. 이온들의 산란형태 및 산란 비거리 등의 결과가 기존의 TRIM과 PIBER 프로그램 결과뿐만 아니라 이미 보고된 실험치와 잘 일치함을 보여 주었다. 또한 프로그램의 사용자 편의를 위하여 Graphic User Interface 방식을 사용하였다.

Keywords

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