이중 콘덕턴스법에 의한 실기체방출률 측정

Measurement of Real Outgassing Rate using Double Conductance Method

  • 발행 : 1996.09.01

초록

Double conductance method is proposed as an effectvie way to measure real outgassing rates of materials regardless of their adsorbing power. The real outgassing rate and the sticking coefficient of the CFC (carbon fiber composite) which is used widely as the material for armor plates infusion experiment devices were obtained by adopting this method. At $40^{\circ}C$ the real ougassing rate was $Pa, m^3/s.m^2$(in $N_2$ equivalent), which was higher than 5 times the measured one, and the sticking coefficient was about 0.018($H_2O\; and \;H_2$ were the main residual gases).

키워드

참고문헌

  1. J. Jpn. Vac. Soc. v.33 K. Odaka
  2. J. Vac. Sci. Technol. v.A2 J. L. Cecchi;R. J. Knize
  3. J. Jpn. Vac. Soc. v.34 S. R. In;T. Maruyama;S. Yokouchi;S. H. Be
  4. J. Vac. Sci. Technol v.A7 K. Terada;T. Okano;Y. Tuzi
  5. 核融合硏究 v.61 T. Tanabe
  6. 日機連62先端-20 眞空材料におけるガス放出量の試驗評價法に關する調査硏究報告書(II) 日本機械工業連合會
  7. KAERI/RR-1536/94 핵융합로연구/토카막장치기술개발 제3차년도 연차보고서(과학기술처) 인상렬;황철규;이광원;김성규;정승호;윤병주;홍봉근;윤재성;송우섭;정문규