Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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Structure and Electrical Properties of $Ru_{1-x}Ir_xO_2$ Films Deposited by a Spray Phrolysis

분무열분해법으로 성장한 $Ru_{1-x}Ir_xO_2$ 박막의 구조와 전기적 특성

  • 서동주 (조선대학교 물리교육과) ;
  • 이관교 (조선대학교 물리교육과) ;
  • 이재연 (조선대학교 물리교육과)
  • Published : 1996.03.01
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Abstract

$RU_{1-x}Ir_xO_2$ films were deposited on the quartz substrate by a spray pyrolysis method. The x-ray diffraction patterns showed that the structure of the $RU_{1-x}Ir_xO_2$ film was tetragonal and the lattice constant $a_o$ and $c_o$ were increased from 4.495 A to 4.058 A and from 3.092A to 3.156 A, respectively as the Ir composition varied from 0.0 to 1.0. The $RU_{1-x}Ir_xO_2$ film was metallic and the resistivity of the samples was increased from $7{\times}10^{-5}{\Omega}\textrm{cm}$ to $48{\times}10^{-5}{\Omega}\textrm{cm}$ with increasing the Ir x. The surface of the sample was slightly roughed, the grain size and the grain boundary width were increased as the Ir composition varied from 0.0 to 1.0.

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