참고문헌
- Electron Letters v.15 Amorphous Silicon Field Effect Device and Possible Application P.G. Le Comber;W.E.Spear;A.Ghaith
- SID'94 Digest A Very Small Ploy-Si TFT-LCD for HDTV Projectors T.Yamashita;T.Matsumoto;Shimada;Y.Akebi;M.Kubo;K.Fujioka
- SID'94 Digest 1.3-in. Full-Color VGA Poly-Si TFT-LCDs with Completely Integrated Dirvers M.Matsuo;T.Hashizume;S.Inoue;M.Miyasaka;S.Takenaka;H.Ohshima
- Appl. Phys. Lett. v.65 Polycrystalline Silicon Thin Film Transistors Deposited at low Substrate Temperature by Remote Plasma Chemical Vapor Deposition Using SiF4/H2 J.I.Woo;H.J.Ihm;J.Jang
- 한국재료학회지 v.5 no.2 Characteristics of Low-Temperature Polysilicon Thin Film Transistors Y.H.Kim
- SID'94 Digest Advances in Liquid Crystals for TFT Displays R.Tarao;H.Saito;S.Sawada;Y.Goto
- Electrochemical Society Fall Meeting Characteristics of TFTs Fabricated from Polycrystalline UHV/CVD Si and Ge-Si Films T.Y.Ma;M.Racanelli;D.W.Greve
- 대한전자공학회논문지 v.28 no.2 Fabrication and Characteristics of Low Temperature Polycrystal Silicon Thin Film Transistors for Displays T.Y.Ma;K.C.Park;S.H.Kim
- Japan Display '92 Future of Amorphous Si TFTs and Their Fabrication Technologies N.Ibaraki
- Jpn. J. Appl. Phys. v.28 no.4 Polycyrstalline Silicon Film Formation at Low Temperature Using a Microcrystalline Silicon Film K.Nakazawa;K.Tanaka;N.Yamauchi
- J. Appl. Phys. v.65 no.5 Crystallized Si Films by Low-Temperature Rapid Thermal Annealing of Amorphous Silicon R.Kakkad;J.Smith;W.S.Lau;S.J.Fonash
- 1st TFT LCD international workshop SNU Metal Induced Lateral Crystallization of Amorphous Silicon Films S.K.Joo;S.W.Lee
- 한국재료학회 춘계 학술발표 논문집 A Study on Solid Phase Crystallization of Amorphous Silicon Thin Films Using Copper Susceptor D.G.Moon;J.N.Lee;B.T.Ahn
- SSDM '95 New Crystallization Process of LPCVD a-Si Films below 530°C Using Metal Adsorption Method D.K.Sohn;J.N.lee;B.T.Ahn
- Jpn. J. Appl. Phys. v.29 no.12 High Mobility Poly-Si Thin Film Transistors Using Plama-Enhanced Chemical Vapor Deposition S.Takenaka;M.Kunii;H.Oka;H.Kurihara
- 한국진공학회지 v.4 no.1 고진공 화학증착법으로 증착된 비정질 실리콘 박막의 저온 고상 결정화에 관한 연구 이상도;김형준
- 한국재료학회지 v.5 no.2 저압 화학 기상 증착법으로 제작한 다결정 실리콘의 표면 형태 및 결정 성장 이은구;박진성;이재갑
- 한국진공학회지 v.2 no.1 저압 화학 증착법으로 제조 된 Hemispherical Poly Si 박막의 미세구조 및 전기적 성질 라사균;김동원
- 한국재료학회 춘계 학술발표 논문집 ECR 플라즈마 CVD를 이용한 TFT-LCD용 a-Si 박막의 증착 및 특성 분석 박상국;김창식;이강렬
- Polycrystaline Silicon for Integrated Circuit Application T.Kamins
- 1st TFT LCD international workshop, Physics of amorphous and poly-Si TFTs for AMLCDS Michael Hack