Electrical & Electronic Materials (E2M - 전기 전자와 첨단 소재)
- Volume 9 Issue 10
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- Pages.1013-1018
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- 1996
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- 2982-6268(pISSN)
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- 2982-6306(eISSN)
The annealing effects of Au/Te/Au n-GaAs structure
Au/Te/Au/ n-GaAs구조의 열처리 효과
Abstract
The annealing effects of Au/Te/Au/n-GaAs structure was investigated by using x-ray diffraction, scanning electron microscope, the specific contact resistance and I-V measurement. Increasing the annealing temperature, the intensity of Au-Ga peak by X-ray diffraction was increased. The Ga
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