Electrical & Electronic Materials (E2M - 전기 전자와 첨단 소재)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지

CO gas sensitivity of ZnO and ZnO-CuO thick films

ZnO와 ZnO-CuO후막의 일산화탄소 감응특성

  • 전석택 (포항공대 재료금속공학과) ;
  • 최우성 (원광대학교 전자재료공학과)
  • Published : 1996.09.01
Download PDF
⟨ Previous Next ⟩

Abstract

We have investigated the temperature dependence of CO gas sensitivity for ZnO and ZnO-CuO thick films at 200 ppm CO gas, where those films were prepared by thermal transformation. The ZnO thick film shows the maximum sensitivity of -4 at >$300^{\circ}C$ On the other hand, ZnO-CuO(more than 1mol%) thick film shows that the maximum sensitivity reduced to less than 1.5. The decrease in sensitivity of CO gas with increasing the CuO contents is due to the decrease of the oxygen absorption in thick films.

Keywords