Dependence of ambient gas of oxide films fabricated by laser ablation method

레이저 어브레이션법에 의해 제조된 산화물 박막의 분위기가스 의존성

  • 최충석 (인하대학교 전기공학과) ;
  • 이덕출 (인하대학교 전기공학과)
  • Published : 1996.05.01

Abstract

The superconducting properties of YBa$_{2}$Cu$_{3}$$O_{7-x}$(YBaCuO) thin films prepared by laser ablation have been investigated. The x-ray diffraction patterns of the films were substantially different from one another. The Y and Ba oxides are formed by the collisions with oxygen molecules. On the other hand, the Cu oxide is mainly formed at initial stage of the laser irradiation. The YBaCuO films manufactured on MgO(100) substrate were indicated T$_{c}$(zero)=90 K, T$_{c}$(onset)=92 K, and J$_{c}$=3.5*10$^{5}$ A/cm$^{2}$(at 77.3K). The optimum conditions were found to be a substrate temperature of 710.deg. C, an energy density of 2 J/cm$^{2}$, and a target-substrate distance of 60mm in an oxygen partial pressure of 200 mTorr.0 mTorr.

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