Trial Maunfacture of Planar Type Micro Inductors

평면형 마이크로인덕터의 시작에 관한 연구

The developmement of electronic machine industries requires miniature of size as well as increasement of driving frequency in electronic parts, recently. To realize micro-struture of magnetic devices, in this study, we fabricated thin film inductors by using thin film manufacturing techniques such as photolithography and wet etching process, and these devices are measured at high frequency range of 1 MHz~1 GHz. The results are as follows. The accurate measuring technique by using network analyzer system having microstrip line was established. The manufactured inductors are fabricated with several ten micrometers by means of wet etching process known as easier and more economic than dry etching process. VVhen the device size of two types (spiral, meander) is the same, inductance value L and quality factor Q of spiral type devices are larger than those of meander type, but driving frequency of spiral type is lower than that of meander type due to increasement of inductance L. It is necessary to decrease resistance value R by increasing cross section of the conductor film coil. Thus high frequency measuring method would be a very useful for another measuring fields of the range over several hundreds MHz.

자기소자중 가장 기본이 되는 박막인덕터의 제작에 관한 연구를 수행하기 위하여, photolitho-graphy와 에칭공정을 도입하고, 도체간격 및 도체폭이 수십 $\mu\textrm{m}$, 도체코일 턴수가 각각 13회와 20회, 크기가 $4\;mm{\times}4\;mm$인 공심형 박막인덕터를 제작하였다. 이것을 마이크로스트립선로에 정착하고, network analyzer로 주파수 1 MHz ~ 1 GHz에서 신호의 반사계수법을 이용하여 간편하고 비교적 정확한 측정을 하였다. 특히, 공정이 간단한 습식 에칭공정을 도입하여, 안정된 에칭기술을 통해 양호한 미세패턴구조를 얻었다. 박막인덕터의 특성은, 크기가 같을때, L 및 Q값은 spiral형이 meander형 보다 큰 값을 갖는 반면, 공진주파수는 인덕턴스의 증가에 의한 영향으로 spiral형이 meander형보다 감소하였다.