The Korean Journal of Ceramics

한국세라믹학회 (The Korean Ceramic Society)
권호 표지

Nucleation of CVD Diamond on Various Substrate Materials

  • Fukunaga, O. (Department of Inorganic Materials, Tokyo Institute of Technology Ookyama) ;
  • Qiao, Xin (Department of Inorganic Materials, Tokyo Institute of Technology Ookayama) ;
  • Ma, Yuefei (Department of Inorganic Materials, Tokyo Institute of Technology Ookayama) ;
  • Shinoda, N. (Ogura Jewel Industry) ;
  • Yui, K. (Ogura Jewel Industry Co. Lt.) ;
  • Hirai, H. (Materials and Structures Laboratory, Tokyo Instutute of Technology) ;
  • Tsurumi, T. (Department of Inorganic Materials, Tokyo Institute of Technology Ookayama) ;
  • Ohashi, N. (Department of Inorganic Materials, Tokyo Institute of Technology Ookayama)
  • 발행 : 1996.12.01
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초록

Diamod nucleation by mw assisted CVD was examined various conditions namely, (1) diamond nucleation on variour substrate materials, such as Si, cubic BN, pyrolytic BN and AIN, (2) AST(Activated species transport) method which promote nucleation of diamond on single crystal and polycrystalline alumina substrate was developed. (3) Effect of bias enhancement of nucleation on single crystalline Si was examined, and finally (4) DST (Double step treatment) method was developed to enhance diamond nucleation on Ni. In this method, we separated carbon diffusing process into Ni, carbon precipitating process from the inside of Ni and diamond precipitation process.

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참고문헌

  1. J. Am. Ceram. Soc. v.74 no.1 Effect of Microwave Power on Hydrogen Content in Chemically Vapor Deposited Diamond Film H. Hirai;O. Fukunaga;O. Odawara
  2. J. Cryst. Growth v.52 Vapor Growth of Diamond on Diamond and Other Surfaces B. V. Spitsyn;L. L. Bouilov;B. V. Deryagin
  3. Diamond and Related Materi v.5 no.10 Enhancement of diamond nucleation on alumina substrates by the activated species transport method Xin Qiao;O. Fukunaga;N. Shinoda;K. Yui
  4. Res. Report Asahi Glass Fundation(in Japanese) v.61 Prepartion of Functional Diamond Film by CVD Method O. Fukunaga
  5. Diamond and Related Mater. v.1 no.2;4 A new method for the generation of diamond nuclei by plasma CVD S. Yugo;T. Kanai;T. Kimura
  6. Diamond and Related Mater v.4 no.12 Effect of bias enhanced nucleation on the nucleation density of diamond in microwave plasma CVD Y. Ma;T. Tsurumi;N. Shinoda;O. Fukunaga
  7. Diamond and Related Mater. v.2 no.12 Diamond deposition on chromium, cobalt and nickel substrates by microwave plasma chemical vapour deposition R. Haubner;A. Lindlbauer;B. Lux