전자공학회논문지A (Journal of the Korean Institute of Telematics and Electronics A)
- 제33A권4호
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- Pages.106-111
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- 1996
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- 1016-135X(pISSN)
레이저 열처리된 다결정 실리콘 기판을 이용한 소트키 다이오드의 제작 및 그 전기적 특성에 관한 연구
A study on the fabrication and its electrical characteristics of the schottky diodes on the laser anneled poly-si substrate
- Kim, Jae-Yeong (Dept. of Elec. Eng., Sogang Univ.) ;
- Kang, Moon-Sang (Dept. of Elec. Eng., Sogang Univ.) ;
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Koo, Yong-Seo
(Dept. of Computer Eng., Seokyeong Univ.) ;
- An, Chul (Dept. of Elec. Eng., Sogang Univ.)
- 발행 : 1996.04.01
초록
Schottky diodes are fabricated on laser annealed and unannealed polysilicon substrate and their electrical characteristics are studied and analyzed. Current of laser annealed devices are larger than that of unannealed devices because of grain growth, decrease of grain boundary and trap density, lowering of grain boundary barrier height, decrease of dopant segregation. At low forward bias (<0.7V), currents of unanealed devices are larger. Soft breakdown voltages of laser annealed devices are larger than that of unannealed devices.
키워드