Automated Simulation System for Micromachines

마이크로머쉰의 자동 시뮬레이션 시스템

  • Published : 1996.06.01

Abstract

This paper describes a new automated simulation system for micromachines whose size range $10^{-6}$ to $10^{-3}$ m. An automic finite element (FE) mesh generation technique, which is bases on the fuzzy knowledge processing and computation al geometry technique, is incorporated into the system, together with one of commerical FE analysis codes, MARC, and one of commerical solid modelers, Designbase. The system allows a geometry model of concern to be automatically converted to different FE models, depending on physical phenomena of micromachines to be analyzed, i,e. electrostatic analysis, stress analysis, modal analysis and so on. The FE models are then automatically analyzed using the FE analysis code. Among a whole process of analysis, the definition of a geometry model, the designation of local node patterns and the assignment of material properties and boundary conditions onto the geometry model are only the interactive process to be done by a user. The interactive operations can be processed in a few minutes. The other processes which are time consuming and labour-intensive in conventional CAE systems are fully automatically performed in a popular engineering workstation environment. This automated simulation system is successfully applied to evaluate an electrostatic micro wobble actuator.

Keywords

References

  1. Proc. 1st Int. Symp. on Research into Arifacts Micromachines as Intelligent Artifacts N. Nakajima
  2. IEEE Transactions on Electron Devices, ED-29 SENSIM : A Simulation Program for Solid-State Pressure Sensors K.W. Lee;K.D. Wise
  3. FastCap User's Guide, Research laboratory of Electronics, Dept. of Electrical Engineering and Computer Science K. Nabors;S. Kim;J. White;S. Senturia
  4. Proceedings of the IEEE Micro Electro Mechanical Systems Workshop Implementation of a MEMCAD System for Electrostatic and Mechanical Analysis of Complex Structures from Mask Descriptions J.R. Gilbert(et al.)
  5. IEEE Solid-State Sensors and Actuators (Transducers '91) Software Tools for Designers of Sensor and Actuator CAE Systems S. Crary;O. Juma;Y. Zhang
  6. Journal of the Korea Sociey of CAD/CAM Engineers, Accepted for publication Automatic Mesh Generation for Three-Dimensional Structures Consisting of Free-Form Surfaces Joon-Seong Lee(et al.)
  7. MARC manual k5.2 MARC Analysis Research Corporation
  8. Solid Modeling with Designbase : Theory and Implementation H. Chiokura
  9. Materials and Processes Design of Micro-mechanisms Focusing on Configuration N. Shibaike
  10. Information and Control v.12 Fuzzy Algorithms L.A. Zadeh
  11. IEEE Transactions on System, Man and Cybernetics, SMC-3 Outline of a New Approach to the Analysis of Complex Systems and Decision Process L.A. Zadeh
  12. Computational Geometry Practical Use of Bucketing Techniques in Computational Geometry T. Asano
  13. The Computer Journal v.24 Computing the n-Dimensional Delaunay Tessellation with Application to Voronoi Polytopes D.F. Watson
  14. Advances in Engineering Software v.9 A Fast Algorithm for Constructing Delaunay Triangulation in the Plane S.W. Sloan
  15. Electret Science, Company, Star City Electrostatic Motors O.D. Jefimenko
  16. Sensors and Actuators A v.19 Microrobots and Micromechanical System W.S.N. Trimmer
  17. IEEE Solid-State Sensors and Actuators (Transducers '87) The Principle of an Electrostatic Linear Actuator Manufactured by Silicon Micromachining H. Fujita;A. Omodaka
  18. Proceedings of the 2nd IEEE Workshop on Micro Electro Mechanical System(MEMS) IC-Processed Micro-Motors : Design, Technology, and Testing Y.C. Tai;L.S. Fan;R.S. Muller
  19. Journal of Microelectro-mechanical Systems v.1 no.1 Design, Fabrication, and Operation of Submicron Gap Comb-Drive Microactuators T. Hirano;T. Furuhata;K.J.Gabriel;H. Fujita
  20. Journal of Microelectromechanical Systems v.1 no.3 Electroc and Fluid Analysis of Side-Drive Micromotors M.P. Omar;R.L. Mullen
  21. Sensors and Actuators A v.20 IC-processed Electrostatic Synchronous Micromotors Y.C. Tai;R.S. Muller
  22. IEEE Transactions on Electron Devices v.35 no.6 The Fabrication of an Electrostatic Linear Actuator by Silicon Micromachining H. Fujita;A. Omodaka
  23. Sensors and Actuators A A CAE System for Micromachines J.S. Lee(elt al.)