공정 변수 변화에 따른 실란 플라즈마내 음이온 특성

The Characteristics of Negative lons in Silane Plasma Changing the Process Variables

We have studied the generation and behavior of negative ions in silane plasmas. The negative ions were formed by homogeneous reaction in silane plasma and the behavior of negative ions were predicted by solving the model equations. The concentration profiles of negative ions were shown as a function of reactor length and time. The effects of process variables such as reactor pressure, flow rate and electrical field strengths on the behavior of negative ions were analyzed.