Journal of the Korean Institute of Navigation (한국항해학회지)
- Volume 19 Issue 4
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- Pages.83-92
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- 1995
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- 1225-0481(pISSN)
A Study on the Development & Performance Improvement of Vertical Type LPE System for a Ulta Thin Layer Single Crystal Growth
초박막구조 단결정성장을 위한 수직형 LPE장치의 제작과 성능개선에 관한 연구
Abstract
In this study, a vertical type LPE system has been developed for III-V semiconductor compounds single crystal growth. On the basis of the experience & basic study using this system, the system modification has been carried out for a ultra thin multi-layer single crystal. The temperature fluctuation was within
Keywords