Journal of the Korean Vacuum Society (한국진공학회지)
- Volume 4 Issue S2
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- Pages.131-138
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- 1995
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- 1225-8822(pISSN)
THE NEW TYPE BROAD BEAM ION SOURCES AND APPLICATIONS
- You, D.W. (Center for Space science & Applied Research, Academic Sinic) ;
- Feng, Y.C. (Center for Space science & Applied Research, Academic Sinic) ;
- Wang, Y. (Center for Space science & Applied Research, Academic Sinic) ;
- Kuang, Y.Z. (Center for Space science & Applied Research, Academic Sinic)
- Published : 1995.06.01
Abstract
The broad beam ion sources of hot filament plasma type have widely used for modifications of materials and thin films, and the new type intensive current broad beam metal ion source including reactive gaseous ion beams is needed for preparing the hard coating films such as DLC,
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