Journal of the Korean Vacuum Society (한국진공학회지)
- Volume 4 Issue S1
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- Pages.185-189
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- 1995
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- 1225-8822(pISSN)
Diamond Deposition by the R.F.Thermal Plasma at Atmospheric Pressure
대기압하의 고주파 열 플라즈마에 의한 다이아몬드 증착
- Park, Hyun (Dept. of Chemical Engineering, College of Engineering, InHa University) ;
- Park, Dong-Wha (Dept. of Chemical Engineering, College of Engineering, InHa University)
- Published : 1995.02.01
Abstract
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