Application of Synchrotron Radiaton to Semiconductor Process and Surface Photochemical Reaction

• Lee, Ki-Ho (Department of Chemical Engineering Pohang University Of Science and Technology) ;
• Kim, Byoung-Youp (Department of Chemical Engineering Pohang University Of Science and Technology) ;
• Rhee, Shi-Woo (Department of Chemical Engineering Pohang University Of Science and Technology)

• 이기호 (포항공과대학교 화학공학과 재료공정연구실) ;
• 김병엽 (포항공과대학교 화학공학과 재료공정연구실) ;
• 이시우 (포항공과대학교 화학공학과 재료공정연구실)

• Published : 1995.02.01

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