Journal of the Korean Vacuum Society (한국진공학회지)
- Volume 4 Issue 2
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- Pages.172-176
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- 1995
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- 1225-8822(pISSN)
Preparation of $YBa_2Cu_3O_{7-y}$ Superconducting Thin Films by on-axis Sputtering
on-axis 스퍼터링 방법에 의한 $YBa_2Cu_3O_{7-y}$ 초전도 박막 제조
Abstract
Keywords