Journal of the Korean Vacuum Society (한국진공학회지)
- Volume 4 Issue 1
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- Pages.12-17
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- 1995
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- 1225-8822(pISSN)
Diamond-like Carbon Films Synthesized from $CH_4$ , $CH_4-H_2$ , and $CH_4-Ar$ Plasmas
메탄, 메탄-수소 및 메탄-아르곤 플라즈마로부터 합성된 다이아몬드성 탄소막
- Choi, Y. (HanWha Group Research Center) ;
- Hong, J. W. (HanWha Group Research Center) ;
- Lee, H. W. (HanWha Group Research Center) ;
- Song, J. S. (Surface Engineering Lab., Korea Academy of Industrial Technology)
- Published : 1995.03.01
Abstract
Diamondlike carbon(DLC)films having good characteristics in mechanical and optical properties, were synthesized by rf-plasma enhanced chemical vapor deposition method. Methane, methane-hydrogen, or methane-argon were used as source gases. The infrared transparency and composition of the films were investigate. Especially, the anti-reflection effect of KLC film in infrared region was confirmed by depositing it on Ge/Si sample. When DLC films were deposited on the plastic substrates and thermal distortion, which were originated before and during deposition, respectively, played a role as a crack source of the films.
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