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Ph D thesis, Dept. of. Metal. Eng. Yonsei Univ.
Low Temperature Epitaxial Growth of CoSi₂and
$Si_{0.5}Ge_{0.5}$ Thin Films by Ion Assisted Deposition S.W.Park - Thin Films Free Atoms and Particles G.Gautherin;C.Schwebel;Kenneth J. Klabunde(ed.)
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